{"id":15441,"date":"2025-07-08T09:22:55","date_gmt":"2025-07-08T09:22:55","guid":{"rendered":"https:\/\/www.epicmicron.com\/?p=15441"},"modified":"2025-07-08T09:35:34","modified_gmt":"2025-07-08T09:35:34","slug":"key-equipment-for-silicon-based-anode-production","status":"publish","type":"post","link":"https:\/\/www.epicmicron.com\/vi\/key-equipment-for-silicon-based-anode-production\/","title":{"rendered":"Thi\u1ebft b\u1ecb ch\u00ednh cho s\u1ea3n xu\u1ea5t anode g\u1ed1c silicon"},"content":{"rendered":"

Trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t anode g\u1ed1c silicon, vi\u1ec7c l\u1ef1a ch\u1ecdn v\u00e0 c\u1ea5u h\u00ecnh thi\u1ebft b\u1ecb chuy\u00ean d\u1ee5ng \u1ea3nh h\u01b0\u1edfng tr\u1ef1c ti\u1ebfp \u0111\u1ebfn ch\u1ea5t l\u01b0\u1ee3ng s\u1ea3n ph\u1ea9m v\u00e0 hi\u1ec7u qu\u1ea3 s\u1ea3n xu\u1ea5t. So v\u1edbi s\u1ea3n xu\u1ea5t anode graphite truy\u1ec1n th\u1ed1ng, thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t anode g\u1ed1c silicon c\u00f3 y\u00eau c\u1ea7u k\u1ef9 thu\u1eadt cao h\u01a1n v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c ki\u1ec3m so\u00e1t ch\u1eb7t ch\u1ebd h\u01a1n. T\u00f9y thu\u1ed9c v\u00e0o \u0111\u1eb7c \u0111i\u1ec3m quy tr\u00ecnh c\u1ee7a anode silicon-oxy v\u00e0 anode silicon-cacbon, thi\u1ebft b\u1ecb c\u1ed1t l\u00f5i c\u1ee7a ch\u00fang kh\u00e1c nhau. Tuy nhi\u00ean, ch\u00fang c\u0169ng c\u00f3 th\u1ec3 chia s\u1ebb m\u1ed9t s\u1ed1 thi\u1ebft b\u1ecb chung. <\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

Thi\u1ebft b\u1ecb ch\u00ednh v\u00e0 \u0111\u1eb7c \u0111i\u1ec3m k\u1ef9 thu\u1eadt trong s\u1ea3n xu\u1ea5t anot g\u1ed1c silicon<\/h2>\n\n\n\n

H\u1ec7 th\u1ed1ng l\u00f2 th\u0103ng hoa<\/h3>\n\n\n\n

H\u1ec7 th\u1ed1ng l\u00f2 th\u0103ng hoa l\u00e0 thi\u1ebft b\u1ecb c\u1ed1t l\u00f5i \u0111\u1ec3 chu\u1ea9n b\u1ecb ti\u1ec1n ch\u1ea5t anot silic-oxy, ch\u1ee7 y\u1ebfu \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 t\u1ed5ng h\u1ee3p oxit silic (SiOx). C\u00e1c l\u00f2 th\u0103ng hoa hi\u1ec7n \u0111\u1ea1i th\u01b0\u1eddng \u00e1p d\u1ee5ng thi\u1ebft k\u1ebf th\u1eb3ng \u0111\u1ee9ng v\u00e0 c\u00f3 hai khu v\u1ef1c ch\u1ee9c n\u0103ng. Ph\u1ea7n d\u01b0\u1edbi l\u00e0 khu v\u1ef1c gia nhi\u1ec7t, s\u1eed d\u1ee5ng ph\u01b0\u01a1ng ph\u00e1p gia nhi\u1ec7t c\u1ea3m \u1ee9ng t\u1ea7n s\u1ed1 trung b\u00ecnh ho\u1eb7c gia nhi\u1ec7t thanh silic-molypden. Nhi\u1ec7t \u0111\u1ed9 c\u1ee7a n\u00f3 c\u00f3 th\u1ec3 \u0111\u1ea1t t\u1edbi 1200 \u2013 1800\u00b0C. Ph\u1ea7n tr\u00ean l\u00e0 khu v\u1ef1c l\u1eafng \u0111\u1ecdng, \u0111\u01b0\u1ee3c trang b\u1ecb t\u1ea5m thu gom l\u00e0m m\u00e1t b\u1eb1ng n\u01b0\u1edbc. Nhi\u1ec7t \u0111\u1ed9 ng\u01b0ng t\u1ee5 n\u1eb1m trong kho\u1ea3ng 400 \u2013 800\u00b0C th\u00f4ng qua h\u1ec7 th\u1ed1ng trao \u0111\u1ed5i nhi\u1ec7t. <\/p>\n\n\n\n

L\u00f2 th\u0103ng hoa ho\u1ea1t \u0111\u1ed9ng trong m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng ho\u1eb7c \u00e1p su\u1ea5t th\u1ea5p (0,01 \u2013 1000Pa) v\u00e0 y\u00eau c\u1ea7u nh\u00f3m b\u01a1m ch\u00e2n kh\u00f4ng hi\u1ec7u su\u1ea5t cao v\u00e0 h\u1ec7 th\u1ed1ng ki\u1ec3m so\u00e1t \u00e1p su\u1ea5t. L\u00f2 th\u0103ng hoa ti\u00ean ti\u1ebfn c\u0169ng t\u00edch h\u1ee3p h\u1ec7 th\u1ed1ng gi\u00e1m s\u00e1t tr\u1ef1c tuy\u1ebfn c\u00f3 th\u1ec3 theo d\u00f5i s\u1ef1 ph\u00e2n b\u1ed1 tr\u01b0\u1eddng nhi\u1ec7t \u0111\u1ed9 v\u00e0 t\u1ed1c \u0111\u1ed9 th\u0103ng hoa v\u1eadt li\u1ec7u theo th\u1eddi gian th\u1ef1c \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o t\u00ednh \u0111\u1ed3ng nh\u1ea5t v\u00e0 \u1ed5n \u0111\u1ecbnh c\u1ee7a th\u00e0nh ph\u1ea7n SiOx. L\u00f2 th\u0103ng hoa do Vi\u1ec7n nghi\u00ean c\u1ee9u c\u00f4ng ngh\u1ec7 k\u1ef9 thu\u1eadt ti\u1ebft ki\u1ec7m n\u0103ng l\u01b0\u1ee3ng Trung Qu\u1ed1c ph\u00e1t tri\u1ec3n s\u1eed d\u1ee5ng s\u00e1ng t\u1ea1o silic tinh th\u1ec3 th\u1ea3i quang \u0111i\u1ec7n v\u00e0 c\u00e1t th\u1ea1ch anh l\u00e0m nguy\u00ean li\u1ec7u th\u00f4, gi\u1ea3m chi ph\u00ed v\u00e0 th\u1ef1c hi\u1ec7n t\u00e1i ch\u1ebf t\u00e0i nguy\u00ean.<\/p>\n\n\n\n

Thi\u1ebft b\u1ecb chu\u1ea9n b\u1ecb nanosilicon<\/h3>\n\n\n\n

Thi\u1ebft b\u1ecb chu\u1ea9n b\u1ecb nanosilicon l\u00e0 thi\u1ebft b\u1ecb thi\u1ebft y\u1ebfu \u0111\u1ec3 s\u1ea3n xu\u1ea5t anot silicon-cacbon. T\u00f9y thu\u1ed9c v\u00e0o l\u1ed9 tr\u00ecnh k\u1ef9 thu\u1eadt, n\u00f3 ch\u1ee7 y\u1ebfu \u0111\u01b0\u1ee3c chia th\u00e0nh hai lo\u1ea1i: h\u1ec7 th\u1ed1ng CVD (l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc) v\u00e0 h\u1ec7 th\u1ed1ng PVD (l\u1eafng \u0111\u1ecdng h\u01a1i v\u1eadt l\u00fd). Thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t nanosilicon CVD s\u1eed d\u1ee5ng silane (SiH4) l\u00e0m nguy\u00ean li\u1ec7u ph\u1ea3n \u1ee9ng \u0111\u1ec3 chu\u1ea9n b\u1ecb b\u1ed9t nanosilicon b\u1eb1ng c\u00e1ch ph\u00e2n h\u1ee7y nhi\u1ec7t. Thi\u1ebft b\u1ecb ti\u00eau bi\u1ec3u bao g\u1ed3m h\u1ec7 th\u1ed1ng l\u1ecdc ngu\u1ed3n kh\u00ed, bu\u1ed3ng ph\u1ea3n \u1ee9ng, h\u1ec7 th\u1ed1ng gia nhi\u1ec7t, h\u1ec7 th\u1ed1ng x\u1eed l\u00fd kh\u00ed \u0111u\u00f4i v\u00e0 thi\u1ebft b\u1ecb thu gom. Bu\u1ed3ng ph\u1ea3n \u1ee9ng th\u01b0\u1eddng \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf v\u1edbi l\u1edbp l\u01b0u h\u00f3a ho\u1eb7c l\u1edbp c\u1ed1 \u0111\u1ecbnh. \u0110\u1ed9 ch\u00ednh x\u00e1c ki\u1ec3m so\u00e1t nhi\u1ec7t \u0111\u1ed9 ph\u1ea3i n\u1eb1m trong ph\u1ea1m vi \u00b1 5 \u00b0C. <\/p>\n\n\n\n

D\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t CVD nhi\u1ec7t c\u1ee7a Zhongning Silicon Industry, m\u1ed9t c\u00f4ng ty trong n\u01b0\u1edbc, c\u00f3 th\u1ec3 s\u1ea3n xu\u1ea5t b\u1ed9t silicon c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao trong ph\u1ea1m vi 20 \u2013 100nm, v\u1edbi c\u00f4ng su\u1ea5t s\u1ea3n xu\u1ea5t 500 t\u1ea5n m\u1ed7i n\u0103m. Ph\u01b0\u01a1ng ph\u00e1p PVD s\u1eed d\u1ee5ng c\u00f4ng ngh\u1ec7 b\u1ed1c h\u01a1i v\u00e0 ng\u01b0ng t\u1ee5 plasma. Thi\u1ebft b\u1ecb ti\u00eau bi\u1ec3u, ch\u1eb3ng h\u1ea1n nh\u01b0 thi\u1ebft b\u1ecb ph\u01b0\u01a1ng ph\u00e1p pha h\u01a1i v\u1eadt l\u00fd b\u1ed1c h\u01a1i v\u00e0 ng\u01b0ng t\u1ee5 plasma do Boqian New Materials ph\u00e1t tri\u1ec3n d\u01b0\u1edbi \u00e1p su\u1ea5t th\u01b0\u1eddng, c\u00f3 th\u1ec3 s\u1ea3n xu\u1ea5t b\u1ed9t silicon h\u00ecnh c\u1ea7u c\u00f3 k\u00edch th\u01b0\u1edbc h\u1ea1t d\u01b0\u1edbi 100nm, mang l\u1ea1i \u01b0u \u0111i\u1ec3m l\u00e0 \u0111\u1ed9 tinh khi\u1ebft cao v\u00e0 k\u00edch th\u01b0\u1edbc h\u1ea1t \u0111\u1ed3ng \u0111\u1ec1u.<\/p>\n\n\n\n

Thi\u1ebft b\u1ecb t\u1ed5ng h\u1ee3p v\u00e0 ph\u00e2n t\u00e1n cho \u0111i\u1ec7n c\u1ef1c \u00e2m g\u1ed1c silicon<\/h3>\n\n\n\n

Thi\u1ebft b\u1ecb t\u1ed5ng h\u1ee3p v\u00e0 ph\u00e2n t\u00e1n \u0111\u00f3ng vai tr\u00f2 quan tr\u1ecdng trong hi\u1ec7u su\u1ea5t c\u1ee7a \u0111i\u1ec7n c\u1ef1c \u00e2m g\u1ed1c silicon. Thi\u1ebft b\u1ecb bao g\u1ed3m m\u00e1y tr\u1ed9n t\u1ed1c \u0111\u1ed9 cao, m\u00e1y nghi\u1ec1n c\u00e1t v\u00e0 h\u1ec7 th\u1ed1ng ph\u00e2n t\u00e1n si\u00eau \u00e2m.<\/p>\n\n\n\n

\u0110\u1ed1i v\u1edbi qu\u00e1 tr\u00ecnh nghi\u1ec1n c\u00e1t c\u1ee7a \u0111i\u1ec7n c\u1ef1c \u00e2m silicon-cacbon, thi\u1ebft b\u1ecb th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng l\u00e0 m\u00e1y nghi\u1ec1n c\u00e1t n\u1eb1m ngang v\u1edbi v\u1eadt li\u1ec7u nghi\u1ec1n zirconium oxide ho\u1eb7c tungsten carbide (h\u1ed7n h\u1ee3p 3mm v\u00e0 5mm). C\u01b0\u1eddng \u0111\u1ed9 nghi\u1ec1n v\u00e0 th\u1eddi gian ph\u1ea3i ch\u00ednh x\u00e1c theo \u0111\u1eb7c t\u00ednh v\u1eadt li\u1ec7u. Thi\u1ebft b\u1ecb t\u1ed5ng h\u1ee3p do Shanghai Shanshan Technology ph\u00e1t tri\u1ec3n k\u1ebft h\u1ee3p ph\u00e2n t\u00e1n si\u00eau \u00e2m v\u1edbi quy tr\u00ecnh nghi\u1ec1n c\u00e1t m\u1ed9t c\u00e1ch s\u00e1ng t\u1ea1o. \u0110\u1ea7u ti\u00ean, x\u1eed l\u00fd s\u01a1 b\u1ed9 b\u1eb1ng si\u00eau \u00e2m c\u00f3 th\u1ec3 ph\u00e1 v\u1ee1 s\u1ef1 k\u1ebft t\u1ee5 c\u1ee7a c\u00e1c h\u1ea1t v\u1edbi c\u00f4ng su\u1ea5t v\u00e0 th\u1eddi gian c\u00f3 th\u1ec3 \u0111i\u1ec1u ch\u1ec9nh). Sau \u0111\u00f3, nghi\u1ec1n v\u00e0 tinh ch\u1ebf c\u00e1t s\u1ebd ti\u1ebfp t\u1ee5c x\u1eed l\u00fd v\u00e0 c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3 hi\u1ec7u \u1ee9ng ph\u00e2n t\u00e1n. <\/p>\n\n\n\n

Thi\u1ebft b\u1ecb t\u1ea1o h\u1ea1t v\u00e0 s\u1ea5y kh\u00f4<\/h3>\n\n\n\n
\"\"<\/figure>\n\n\n\n

Thi\u1ebft b\u1ecb t\u1ea1o h\u1ea1t v\u00e0 s\u1ea5y \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 chuy\u1ec3n \u0111\u1ed5i b\u1ed9t nano-silicon ho\u1eb7c silicon oxide th\u00e0nh c\u00e1c h\u1ea1t th\u1ee9 c\u1ea5p ph\u00f9 h\u1ee3p cho qu\u00e1 tr\u00ecnh x\u1eed l\u00fd ti\u1ebfp theo. Thi\u1ebft b\u1ecb t\u1ea1o h\u1ea1t \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng ph\u1ed5 bi\u1ebfn nh\u1ea5t l\u00e0 th\u00e1p s\u1ea5y phun. Sau khi tr\u1ed9n h\u1ed7n h\u1ee3p ch\u1ee9a silicon v\u1edbi ch\u1ea5t k\u1ebft d\u00ednh, c\u00e1c gi\u1ecdt nh\u1ecf \u0111\u01b0\u1ee3c h\u00ecnh th\u00e0nh th\u00f4ng qua m\u1ed9t b\u00ecnh phun. N\u00f3 nhanh ch\u00f3ng kh\u00f4 d\u01b0\u1edbi kh\u00f4ng kh\u00ed n\u00f3ng. H\u1ec7 th\u1ed1ng t\u1ea1o h\u1ea1t th\u1ee9 c\u1ea5p do Vi\u1ec7n nghi\u00ean c\u1ee9u c\u00f4ng ngh\u1ec7 v\u00e0 k\u1ef9 thu\u1eadt ti\u1ebft ki\u1ec7m n\u0103ng l\u01b0\u1ee3ng Trung Qu\u1ed1c ph\u00e1t tri\u1ec3n s\u1eed d\u1ee5ng b\u00ecnh phun \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1eb7c bi\u1ec7t v\u00e0 h\u1ec7 th\u1ed1ng tu\u1ea7n ho\u00e0n kh\u00f4ng kh\u00ed n\u00f3ng \u0111\u1ec3 t\u1ea1o ra c\u00e1c h\u1ea1t \u0111\u1ed3ng nh\u1ea5t trong ph\u1ea1m vi 30 \u0111\u1ebfn 50\u03bcm, c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3 t\u00ednh l\u01b0u \u0111\u1ed9ng c\u1ee7a b\u1ed9t si\u00eau m\u1ecbn. \u0110\u1ed1i v\u1edbi c\u00e1c h\u1ec7 th\u1ed1ng d\u1ef1a tr\u00ean dung m\u00f4i, m\u00e1y s\u1ea5y ch\u00e2n kh\u00f4ng ho\u1eb7c m\u00e1y s\u1ea5y \u0111\u0129a c\u0169ng c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng, nh\u01b0ng ph\u1ea3i ch\u00fa \u00fd \u0111\u1ebfn v\u1ea5n \u0111\u1ec1 ch\u1ed1ng ch\u00e1y n\u1ed5 v\u00e0 thu h\u1ed3i dung m\u00f4i. M\u00e1y t\u1ea1o h\u1ea1t v\u00e0 s\u1ea5y t\u1ea7ng s\u00f4i m\u1edbi k\u1ebft h\u1ee3p c\u00f4ng ngh\u1ec7 l\u01b0u h\u00f3a v\u00e0 phun, mang l\u1ea1i hi\u1ec7u qu\u1ea3 t\u1ea1o h\u1ea1t cao h\u01a1n v\u00e0 \u0111\u1ed9 b\u1ec1n h\u1ea1t t\u1ed1t h\u01a1n. N\u00f3 \u0111ang d\u1ea7n \u0111\u01b0\u1ee3c \u00e1p d\u1ee5ng trong s\u1ea3n xu\u1ea5t \u0111i\u1ec7n c\u1ef1c \u00e2m d\u1ef1a tr\u00ean silicon cao c\u1ea5p.<\/p>\n\n\n\n

Thi\u1ebft b\u1ecb ph\u1ee7 v\u00e0 x\u1eed l\u00fd nhi\u1ec7t<\/h3>\n\n\n\n

Thi\u1ebft b\u1ecb ph\u1ee7 v\u00e0 x\u1eed l\u00fd nhi\u1ec7t \u0111\u00f3ng vai tr\u00f2 quan tr\u1ecdng trong vi\u1ec7c c\u1ea3i thi\u1ec7n hi\u1ec7u su\u1ea5t \u0111i\u1ec7n h\u00f3a c\u1ee7a \u0111i\u1ec7n c\u1ef1c \u00e2m g\u1ed1c silicon. Ch\u00fang bao g\u1ed3m h\u1ec7 th\u1ed1ng CVD t\u1ea7ng s\u00f4i, l\u00f2 quay v\u00e0 l\u00f2 \u1ed1ng. L\u00f2 ph\u1ea3n \u1ee9ng t\u1ea7ng s\u00f4i \u0111\u1eb7c bi\u1ec7t hi\u1ec7u qu\u1ea3 \u0111\u1ed1i v\u1edbi l\u1edbp ph\u1ee7 carbon \u0111i\u1ec7n c\u1ef1c \u00e2m silicon-oxy. Ng\u01b0\u1eddi v\u1eadn h\u00e0nh \u0111\u1ea1t \u0111\u01b0\u1ee3c s\u1ef1 l\u1eafng \u0111\u1ecdng l\u1edbp carbon \u0111\u1ed3ng \u0111\u1ec1u b\u1eb1ng c\u00e1ch ki\u1ec3m so\u00e1t ch\u00ednh x\u00e1c v\u1eadn t\u1ed1c kh\u00ed l\u01b0u h\u00f3a (ch\u1eb3ng h\u1ea1n nh\u01b0 c\u00e0i \u0111\u1eb7t ban \u0111\u1ea7u l\u00e0 8L\/gi\u00e2y) v\u00e0 tr\u01b0\u1eddng nhi\u1ec7t \u0111\u1ed9 (600 \u2013 1000\u00b0C). H\u1ec7 th\u1ed1ng t\u1ea7ng s\u00f4i ti\u00ean ti\u1ebfn c\u00f3 b\u1ed9 gia nhi\u1ec7t tr\u01b0\u1edbc (v\u1edbi nhi\u1ec7t \u0111\u1ed9 gia nhi\u1ec7t tr\u01b0\u1edbc \u2265 400\u00b0C) v\u00e0 b\u1ed9 trao \u0111\u1ed5i nhi\u1ec7t, gi\u00fap gi\u1ea3m m\u1ee9c ti\u00eau th\u1ee5 n\u0103ng l\u01b0\u1ee3ng v\u00e0 gi\u1ea3m thi\u1ec3u bi\u1ebfn \u0111\u1ed9ng nhi\u1ec7t \u0111\u1ed9. <\/p>\n\n\n\n

\u0110\u1ed1i v\u1edbi qu\u00e1 tr\u00ecnh cacbon h\u00f3a \u0111i\u1ec7n c\u1ef1c \u00e2m silicon-carbon, c\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t th\u01b0\u1eddng s\u1eed d\u1ee5ng l\u00f2 quay \u0111\u01b0\u1ee3c b\u1ea3o v\u1ec7 b\u1eb1ng kh\u00ed quy\u1ec3n ho\u1eb7c l\u00f2 \u0111\u1ea9y t\u1ea5m. Ch\u00fang th\u01b0\u1eddng ho\u1ea1t \u0111\u1ed9ng trong ph\u1ea1m vi nhi\u1ec7t \u0111\u1ed9 t\u1eeb 1000 \u2013 1500\u00b0C, v\u1edbi th\u1eddi gian x\u1eed l\u00fd t\u1eeb 2 \u2013 5 gi\u1edd. Nh\u00f3m nghi\u00ean c\u1ee9u c\u1ee7a \u0110\u1ea1i h\u1ecdc Trung Nam \u0111\u00e3 ph\u00e1t tri\u1ec3n c\u00f4ng ngh\u1ec7 silicon nano tinh th\u1ec3 t\u0103ng c\u01b0\u1eddng khuy\u1ebft t\u1eadt, s\u1eed d\u1ee5ng l\u00f2 x\u1eed l\u00fd nhi\u1ec7t \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1eb7c bi\u1ec7t. H\u1ecd ki\u1ec3m so\u00e1t ch\u00ednh x\u00e1c t\u1ed1c \u0111\u1ed9 gia nhi\u1ec7t v\u00e0 th\u00e0nh ph\u1ea7n kh\u00ed quy\u1ec3n \u0111\u1ec3 \u0111\u01b0a c\u00e1c c\u1ea5u tr\u00fac khuy\u1ebft t\u1eadt nh\u01b0 l\u1ed7i x\u1ebfp ch\u1ed3ng v\u00e0 nanotwin v\u00e0o ch\u1ea5t th\u1ea3i silicon tinh th\u1ec3, c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh chu k\u1ef3 c\u1ee7a \u0111i\u1ec7n c\u1ef1c \u00e2m silicon.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n
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Jet Mill c\u1ee7a Epic Powder<\/figcaption><\/figure>\n\n\n\n

Thi\u1ebft b\u1ecb h\u1eadu x\u1eed l\u00fd <\/h3>\n\n\n\n

Thi\u1ebft b\u1ecb h\u1eadu x\u1eed l\u00fd bao g\u1ed3m c\u00e1c thi\u1ebft b\u1ecb chuy\u00ean d\u1ee5ng \u0111\u1ec3 nghi\u1ec1n, ph\u00e2n lo\u1ea1i, x\u1eed l\u00fd b\u1ec1 m\u1eb7t v\u00e0 \u0111\u00f3ng g\u00f3i.<\/p>\n\n\n\n

M\u00e1y nghi\u1ec1n ph\u1ea3n l\u1ef1c l\u00e0 thi\u1ebft b\u1ecb ch\u00ednh d\u00f9ng \u0111\u1ec3 nghi\u1ec1n si\u00eau m\u1ecbn. Thi\u1ebft b\u1ecb n\u00e0y tr\u00e1nh nhi\u1ec5m kim lo\u1ea1i th\u00f4ng qua thi\u1ebft k\u1ebf va ch\u1ea1m v\u00e0 nghi\u1ec1n v\u1eadt li\u1ec7u th\u00e0nh k\u00edch th\u01b0\u1edbc h\u1ea1t y\u00eau c\u1ea7u (th\u01b0\u1eddng l\u00e0 D50 < 10\u03bcm). H\u1ec7 th\u1ed1ng ph\u00e2n lo\u1ea1i ch\u1ee7 y\u1ebfu s\u1eed d\u1ee5ng m\u00e1y ph\u00e2n lo\u1ea1i kh\u00f4ng kh\u00ed \u0111\u1ec3 ph\u00e2n lo\u1ea1i ch\u00ednh x\u00e1c c\u00e1c h\u1ea1t d\u1ef1a tr\u00ean \u0111\u01b0\u1eddng k\u00ednh kh\u00ed \u0111\u1ed9ng h\u1ecdc c\u1ee7a ch\u00fang. Thi\u1ebft b\u1ecb x\u1eed l\u00fd b\u1ec1 m\u1eb7t bao g\u1ed3m m\u00e1y tr\u1ed9n v\u00e0 m\u00e1y ph\u1ee7 \u0111\u01b0\u1ee3c c\u1ea3i ti\u1ebfn, \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 ph\u1ee7 l\u1edbp ph\u1ee7 ch\u1ee9c n\u0103ng l\u00ean b\u1ec1 m\u1eb7t v\u1eadt li\u1ec7u g\u1ed1c silicon. M\u00e1y kh\u1eed t\u1eeb \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 lo\u1ea1i b\u1ecf t\u1ea1p ch\u1ea5t kim lo\u1ea1i c\u00f3 th\u1ec3 x\u00e2m nh\u1eadp trong qu\u00e1 tr\u00ecnh x\u1eed l\u00fd nguy\u00ean li\u1ec7u th\u00f4 v\u00e0 qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t, th\u01b0\u1eddng s\u1eed d\u1ee5ng thi\u1ebft k\u1ebf t\u00e1ch t\u1eeb c\u00f3 \u0111\u1ed9 d\u1ed1c cao nhi\u1ec1u giai \u0111o\u1ea1n. Thi\u1ebft b\u1ecb \u0111\u00f3ng g\u00f3i ph\u1ea3i ho\u1ea1t \u0111\u1ed9ng trong m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng ho\u1eb7c kh\u00ed quy\u1ec3n kh\u00f4 \u0111\u1ec3 ng\u0103n v\u1eadt li\u1ec7u g\u1ed1c silicon h\u1ea5p th\u1ee5 \u0111\u1ed9 \u1ea9m v\u00e0 oxy h\u00f3a.<\/p>\n\n\n\n

H\u1ec7 th\u1ed1ng \u0111i\u1ec1u khi\u1ec3n t\u1ef1 \u0111\u1ed9ng<\/h2>\n\n\n\n

H\u1ec7 th\u1ed1ng \u0111i\u1ec1u khi\u1ec3n t\u1ef1 \u0111\u1ed9ng \u0111\u00f3ng vai tr\u00f2 l\u00e0 trung t\u00e2m \u0111i\u1ec1u khi\u1ec3n c\u1ee7a d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t \u0111i\u1ec7n c\u1ef1c \u00e2m silicon hi\u1ec7n \u0111\u1ea1i, ch\u1ecbu tr\u00e1ch nhi\u1ec7m \u0111i\u1ec1u khi\u1ec3n ph\u1ed1i h\u1ee3p v\u00e0 thu th\u1eadp d\u1eef li\u1ec7u c\u1ee7a t\u1eebng quy tr\u00ecnh.<\/p>\n\n\n\n

M\u1ed9t h\u1ec7 th\u1ed1ng ki\u1ec3m so\u00e1t thu th\u1eadp th\u00f4ng th\u01b0\u1eddng bao g\u1ed3m c\u00e1c m\u00f4-\u0111un ki\u1ec3m so\u00e1t nhi\u1ec7t \u0111\u1ed9 v\u00e0 l\u01b0u l\u01b0\u1ee3ng theo d\u00f5i c\u00e1c th\u00f4ng s\u1ed1 ch\u00ednh, ch\u1eb3ng h\u1ea1n nh\u01b0 nhi\u1ec7t \u0111\u1ed9 ph\u1ea3n \u1ee9ng c\u1ee7a l\u00f2 th\u0103ng hoa, nhi\u1ec7t \u0111\u1ed9 l\u1eafng \u0111\u1ecdng c\u1ee7a v\u00f9ng l\u1eafng \u0111\u1ecdng, nhi\u1ec7t \u0111\u1ed9 ph\u1ea3n \u1ee9ng c\u1ee7a l\u1edbp s\u00f4i v\u00e0 nhi\u1ec7t \u0111\u1ed9 c\u1ee7a b\u1ed9 gia nhi\u1ec7t tr\u01b0\u1edbc theo th\u1eddi gian th\u1ef1c. H\u1ec7 th\u1ed1ng c\u0169ng thu th\u1eadp v\u00e0 ph\u00e2n t\u00edch d\u1eef li\u1ec7u s\u1ea3n xu\u1ea5t, ch\u1eb3ng h\u1ea1n nh\u01b0 \u0111\u1ea7u ra c\u1ee7a l\u00f2 th\u0103ng hoa, l\u01b0\u1ee3ng c\u1ea5p li\u1ec7u c\u1ee7a l\u1edbp s\u00f4i, l\u01b0u l\u01b0\u1ee3ng ngu\u1ed3n kh\u00ed v\u00e0 l\u01b0\u1ee3ng \u0111\u1ea7u ra, \u0111\u1ec3 t\u1ed1i \u01b0u h\u00f3a quy tr\u00ecnh v\u00e0 \u0111\u1ea3m b\u1ea3o kh\u1ea3 n\u0103ng truy xu\u1ea5t ngu\u1ed3n g\u1ed1c ch\u1ea5t l\u01b0\u1ee3ng. C\u00e1c nh\u00e0 m\u00e1y ti\u00ean ti\u1ebfn c\u0169ng s\u1eed d\u1ee5ng MES (H\u1ec7 th\u1ed1ng th\u1ef1c hi\u1ec7n s\u1ea3n xu\u1ea5t) v\u00e0 c\u00f4ng ngh\u1ec7 Internet c\u00f4ng nghi\u1ec7p \u0111\u1ec3 cho ph\u00e9p qu\u1ea3n l\u00fd k\u1ef9 thu\u1eadt s\u1ed1 v\u00e0 th\u00f4ng minh to\u00e0n b\u1ed9 quy tr\u00ecnh s\u1ea3n xu\u1ea5t.<\/p>\n\n\n\n

B\u1ea3ng: Thi\u1ebft b\u1ecb ch\u00ednh v\u00e0 th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt \u0111\u1ec3 s\u1ea3n xu\u1ea5t \u0111i\u1ec7n c\u1ef1c \u00e2m g\u1ed1c silicon<\/h3>\n\n\n\n
Lo\u1ea1i thi\u1ebft b\u1ecb<\/td>Ch\u1ee9c n\u0103ng ch\u00ednh<\/td>Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt ch\u00ednh<\/td>Nh\u00e0 s\u1ea3n xu\u1ea5t\/C\u00f4ng ngh\u1ec7 ti\u00eau bi\u1ec3u<\/td><\/tr>
H\u1ec7 th\u1ed1ng l\u00f2 th\u0103ng hoa<\/td>T\u1ed5ng h\u1ee3p v\u00e0 l\u1eafng \u0111\u1ecdng SiOx<\/td>Nhi\u1ec7t \u0111\u1ed9 1200-1800\u00b0C, \u00c1p su\u1ea5t 0,01-1000Pa<\/td>Vi\u1ec7n nghi\u00ean c\u1ee9u c\u00f4ng ngh\u1ec7 k\u1ef9 thu\u1eadt CECEP<\/td><\/tr>
Thi\u1ebft b\u1ecb CVD Nano-Si<\/td>S\u1ea3n xu\u1ea5t b\u1ed9t Nano Silicon<\/td>Ph\u00e2n h\u1ee7y silan, K\u00edch th\u01b0\u1edbc h\u1ea1t 20-100nm<\/td>Zhongning Silicon (c\u00f4ng ty con Duofluoride)<\/td><\/tr>
Thi\u1ebft b\u1ecb PVD Nano-Si<\/td>S\u1ea3n xu\u1ea5t Nano Silicon c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao<\/td>S\u1ef1 bay h\u01a1i-ng\u01b0ng t\u1ee5 plasma, K\u00edch th\u01b0\u1edbc h\u1ea1t <100nm<\/td>V\u1eadt li\u1ec7u m\u1edbi Boqian<\/td><\/tr>
H\u1ec7 th\u1ed1ng ph\u00e2n t\u00e1n m\u00e1y nghi\u1ec1n c\u00e1t<\/td>H\u1ee3p ch\u1ea5t Si\/C & Tinh ch\u1ebf<\/td>V\u1eadt li\u1ec7u nghi\u1ec1n 3\/5mm, Th\u1eddi gian x\u1eed l\u00fd 1-3h<\/td>C\u00f4ng ngh\u1ec7 Th\u01b0\u1ee3ng H\u1ea3i Shanshan<\/td><\/tr>
Th\u00e1p phun h\u1ea1t<\/td>Chu\u1ea9n b\u1ecb h\u1ea1t th\u1ee9 c\u1ea5p<\/td>K\u00edch th\u01b0\u1edbc h\u1ea1t 30-50\u03bcm<\/td>Nhi\u1ec1u nh\u00e0 s\u1ea3n xu\u1ea5t chuy\u00ean bi\u1ec7t<\/td><\/tr>
H\u1ec7 th\u1ed1ng CVD t\u1ea7ng s\u00f4i<\/td>X\u1eed l\u00fd ph\u1ee7 Carbon<\/td>Nhi\u1ec7t \u0111\u1ed9 600-1000\u00b0C, V\u1eadn t\u1ed1c kh\u00ed 8L\/s<\/td>C\u00f4ng ngh\u1ec7 \u0111\u1ed9c quy\u1ec1n<\/td><\/tr>
L\u00f2 thi\u00eau k\u1ebft kh\u00ed quy\u1ec3n<\/td>X\u1eed l\u00fd nhi\u1ec7t cacbon h\u00f3a<\/td>Nhi\u1ec7t \u0111\u1ed9 1000-1500\u00b0C, Th\u1eddi gian 2-5h<\/td>Nhi\u1ec1u nh\u00e0 s\u1ea3n xu\u1ea5t chuy\u00ean bi\u1ec7t<\/td><\/tr>
H\u1ec7 th\u1ed1ng nghi\u1ec1n v\u00e0 ph\u00e2n lo\u1ea1i b\u1eb1ng tia<\/td>Nghi\u1ec1n si\u00eau m\u1ecbn & Ph\u00e2n lo\u1ea1i <\/td>D50<10\u03bcm, Ph\u00e2n lo\u1ea1i nhi\u1ec1u giai \u0111o\u1ea1n<\/td>Nh\u00e0 s\u1ea3n xu\u1ea5t chuy\u00ean ng\u00e0nh trong n\u01b0\u1edbc\/qu\u1ed1c t\u1ebf<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

V\u1edbi s\u1ef1 ph\u00e1t tri\u1ec3n nhanh ch\u00f3ng c\u1ee7a ng\u00e0nh c\u00f4ng nghi\u1ec7p \u0111i\u1ec7n c\u1ef1c \u00e2m g\u1ed1c silicon, thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t \u0111ang ti\u1ebfn h\u00f3a theo h\u01b0\u1edbng thi\u1ebft k\u1ebf quy m\u00f4 l\u1edbn h\u01a1n, li\u00ean t\u1ee5c v\u00e0 th\u00f4ng minh h\u01a1n. V\u00ed d\u1ee5, thi\u1ebft k\u1ebf n\u1ea1p li\u1ec7u li\u00ean t\u1ee5c c\u00f3 th\u1ec3 thay th\u1ebf l\u00f2 th\u0103ng hoa theo m\u1ebb truy\u1ec1n th\u1ed1ng. Nhi\u1ec1u l\u1edbp l\u01b0u h\u00f3a n\u1ed1i ti\u1ebfp c\u00f3 th\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c l\u1edbp ph\u1ee7 tu\u1ea7n t\u1ef1 c\u1ee7a c\u00e1c l\u1edbp ch\u1ee9c n\u0103ng kh\u00e1c nhau. T\u1ed1i \u01b0u h\u00f3a th\u00f4ng s\u1ed1 quy tr\u00ecnh v\u00e0 d\u1ef1 \u0111o\u00e1n ch\u1ea5t l\u01b0\u1ee3ng c\u00f3 th\u1ec3 \u00e1p d\u1ee5ng c\u00f4ng ngh\u1ec7 AI. Nh\u1eefng ti\u1ebfn b\u1ed9 c\u00f4ng ngh\u1ec7 n\u00e0y s\u1ebd c\u1ea3i thi\u1ec7n h\u01a1n n\u1eefa hi\u1ec7u qu\u1ea3 s\u1ea3n xu\u1ea5t, t\u00ednh nh\u1ea5t qu\u00e1n c\u1ee7a s\u1ea3n ph\u1ea9m v\u00e0 kh\u1ea3 n\u0103ng c\u1ea1nh tranh v\u1ec1 chi ph\u00ed c\u1ee7a \u0111i\u1ec7n c\u1ef1c \u00e2m g\u1ed1c silicon, \u0111\u1ea9y nhanh \u1ee9ng d\u1ee5ng quy m\u00f4 l\u1edbn c\u1ee7a ch\u00fang trong pin \u0111i\u1ec7n cao c\u1ea5p.<\/p>\n\n\n\n

Gi\u1edbi thi\u1ec7u v\u1ec1 Epic Powder Machinery<\/h2>\n\n\n\n

M\u00e1y m\u00f3c b\u1ed9t Epic<\/a>, c\u00f3 tr\u1ee5 s\u1edf t\u1ea1i Thanh \u0110\u1ea3o, Trung Qu\u1ed1c, chuy\u00ean v\u1ec1 h\u1ec7 th\u1ed1ng nghi\u1ec1n v\u00e0 ph\u00e2n lo\u1ea1i si\u00eau m\u1ecbn. Ch\u00fang t\u00f4i thi\u1ebft k\u1ebf v\u00e0 s\u1ea3n xu\u1ea5t c\u00e1c thi\u1ebft b\u1ecb ti\u00ean ti\u1ebfn, bao g\u1ed3m m\u00e1y nghi\u1ec1n ph\u1ea3n l\u1ef1c v\u00e0 m\u00e1y nghi\u1ec1n ph\u00e2n lo\u1ea1i kh\u00ed, ph\u1ee5c v\u1ee5 c\u00e1c ng\u00e0nh c\u00f4ng nghi\u1ec7p nh\u01b0 pin lithium-ion. V\u1edbi tr\u1ecdng t\u00e2m l\u00e0 ch\u1ea5t l\u01b0\u1ee3ng v\u00e0 s\u1ef1 \u0111\u1ed5i m\u1edbi, ch\u00fang t\u00f4i gi\u00fap b\u1ea1n t\u1ed1i \u01b0u h\u00f3a hi\u1ec7u qu\u1ea3 s\u1ea3n xu\u1ea5t v\u00e0 t\u00ednh nh\u1ea5t qu\u00e1n.<\/p>\n\n\n\n

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